|상품명||Q150 GB Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box|
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Based on the market-leading Q150T Plus coater, the Q150 GB is single platform for both sputtering and carbon rod evaporation. Metal evaporation using filament or boat sources is also possible using an optional insert.
Depending upon user preference, the Q150GB can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), or a high vacuum carbon coater suitable for SEM and transmission electron microscopy (TEM). The flexibility of the Q150 GB can be further expanded using a range of optional accessories.
The Q150 GB can sputter both oxidising and non-oxidising metals making it ideal for many thin film applications.
The Q150 GB has an integral turbomolecular pump and additionally requires a suitable rotary pump or dry pump to “back” the turbomolecular pump. See: Ordering Information for details.
These products are for Research Use Only.
A modular design enables the vacuum chamber to be mounted through the base of the glove box or – when modification to the glove box floor is not possible – inside the glove box itself (optional feedthroughs are required).
A separate power supply housed in a rugged case is designed to be floor-mounted and can be positioned conveniently beneath the glove box or bench. The touch screen user interface is housed in a robust stainless steel case and can be positioned outside of the glove box environment, if preferred.
Vacuum module mounted in the floor of the glove box
A cut-out is made in the floor of the glove box and the vacuum chamber fitted and sealed with the gasket supplied. External connections from the floor-mounted power supply, vacuum pump and argon gas can then be made directly to the chamber.
Vacuum module placed inside the glove box
The chamber assembly is placed inside the glove box and the power supply, vacuum pump and argon gas connections are made through two KF40 feedthroughs in the rear of the glove box.
Note: each Q150 GB is supplied with an accessory/configuration kit to suit either internally or externally mounted vacuum chambers. Additional kits can be designed on a case-by-case basis to allow the Q150 GB to be adapted to various manufacturers’ glove boxes. Please contact Quorum for further details.
Enclosed in a stainless steel case and mounted at a convenient position outside the glove box, the touch screen allows multiple users to input and store coating protocols.
At the operational heart of Q150 GB is the touch screen controller, which allows the most inexperienced or occasional operators to rapidly enter and store their own process data. To further aid ease of use a number of typical sputtering and evaporation profiles are provided.
The vacuum module houses all the working components, including the 70 L/s air-cooled turbomolecular pump. An automatic bleed control ensures optimum vacuum conditions during sputtering and a full-range active gauge is fitted as standard to monitor the vacuum.
The Q150 GB includes “vacuum shutdown”, a convenient feature which enhances vacuum performance by allowing the chamber vacuum to be maintained when the coater is not in use.
A unique feature of the Q150 GB is the integral pressure interlock switch. This independently monitors the pressure inside the glove box and turns off the vacuum pump if the glove box atmosphere is unacceptably reduced due to a vacuum leak.
The vacuum chamber is 214 mm high to allow for increased source-to-substrate distances required for coating large specimens. It has an external diameter of 165 mm and comes with an integral implosion guard. The chamber assembly is easy to remove to allow specimen exchange and chamber cleaning.
A variable speed rotary specimen stage is fitted as standard, with full height adjustment from 0 to 190 mm above the base plate. Other stages are available as options.
Quick-change deposition inserts can be swapped in seconds and the intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.
The Q150 GB features a high-resolution sputter coater insert (10034) for oxidising and non-oxidising (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium, which are highly recommended for FE-SEM applications. Please see: Ordering Information for details of available metal targets.
The high vacuum carbon rod coating insert (10033) is ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The Q150 GB uses economical 3.05 mm diameter carbon rods and the advanced “anti-stick” carbon rod evaporation gun offers simple operation and reproducible results.
A carbon fibre evaporation insert (10455) is available as an option (see: Ordering Information).
Controlled ramped carbon rod evaporation
This comes as standard with E and ES models and has two important benefits. Careful control of evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). In addition the quality of the resulting carbon films is enhanced by the eradication of “sparking” – a common and unwanted feature of less advanced coating systems.
Controlled pulse carbon cord evaporation
If the optional carbon fibre insert (for E and ES models) is fitted, then controlled profiles ensure carbon is evaporated in short pulses. This significantly reduces the amount debris (including large carbon fragments) associated with traditional carbon “flash” evaporation. Also it allows the carbon cord evaporation process to be accurately controlled using the optional film thickness monitor (FTM) accessory.
A quick-change insert (10457) allows metal evaporation from tungsten baskets or molybedenum boats – ideal for thin film applications. For ease of set up in a glove box the metal charge can be loaded into the evaporation source away from the vacuum chamber.
Each of the above configurations can be used with a range of optional accessories. For further details see: Additional Information.